Silane 硅烷 (SiH4)
Total Purity 純度：>99.9999%
Vapor Phase Impurities
氣相雜質(zhì)
|
Contaminants 雜質(zhì) |
|
Specifications (ppmv) 規(guī)格 |
|
Ar |
Argon 氬氣 |
<0.05 |
|
Total Chlorosilane |
Total Chlorosilane 總氯硅烷 |
<0.15 |
|
Disilane |
Disilane 乙硅烷 |
<0.5 |
|
He |
Helium 氦氣 |
<1 |
|
O2 |
Oxygen 氧氣 |
<0.05 |
|
N2 |
Nitrogen 氮?dú)?/span> |
<1 |
|
H2 |
Hydrogen 氫氣 |
<20 |
|
CO |
Carbon Monoxide 一氧化碳 |
<0.05 |
|
CO2 |
Carbon Dioxide 二氧化碳 |
<0.05 |
|
CH4 |
Methane 甲烷 |
<0.05 |
|
Carbon |
Carbon 碳 |
<0.2 ppma |
|
Disiloxane |
Disiloxane 二硅氧烷 |
<0.5 |
|
Methylsilane |
Methylsilane 甲基硅烷 |
<0.5 |
|
Al |
Aluminium 鋁 |
<0.005 ppba |
|
Sb |
Antimony 銻 |
<0.005 ppba |
|
As |
Arsenic 砷 |
<0.005 ppba |
|
B |
Boron 硼 |
<0.02 ppba |
|
Ca |
Calcium 鈣 |
<10 ppba |
|
Ga |
Gallium 鎵 |
<0.005 ppba |
|
In |
Indium 銦 |
<0.005 ppba |
|
P |
Phosphorus 磷 |
<0.02 ppba |
|
K |
Potassium 鉀 |
<10 ppba |
|
Na |
Sodium 鈉 |
<5 ppba |
|
Cr+Cu+Fe+Ni+Zn |
鉻+銅+鐵+鎳+鋅 |
<1 ppba |
|
H2O |
Moisture 水 |
<0.5 |
|
Resistivity |
Resistivity 電阻系數(shù) |
>10000 ohm-cm |
Standard Package Information
包裝規(guī)格
|
Cylinder Type氣瓶規(guī)格 |
47?, Ton-cylinder, 20ft ISO-Container, 40ft ISO-Container |
|
Fill Weight充裝量 (kg) |
10, 100 , 2000 , 4000 |
|
Valve Connection 閥門(CGA) |
JIS 22L, CGA 632, CGA350 |